Drift-free micromirror arrays made of monocrystalline silicon for adaptive optics applications

Journal of Microelectromechanical Systems

Volumn 21, Issue 4, 2012, Pages 959-970

  Lapisa, Martin ^a   Zimmer, Fabian ^b   Stemme, Göran ^a   Gehner, Andreas ^b   Niklaus, Frank ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Heterogeneous integration; mirrors; silicon; spatial light modulators (SLMs); very large scale integration; wafer bonding; wafer scale integration

Indexed keywords

DRIFT-FREE; GAP HEIGHT; HETEROGENEOUS INTEGRATION; MICROMIRROR ARRAY; MIRROR MATERIALS; OPTICS APPLICATION; SILICON ON INSULATOR WAFERS; SPATIAL LIGHT MODULATORS; STRESS EFFECTS; WAFER-SCALE INTEGRATION;

ACTUATORS; INTEGRATION; LIGHT MODULATORS; MONOCRYSTALLINE SILICON; SILICON; SILICON WAFERS; VLSI CIRCUITS; WAFER BONDING; WSI CIRCUITS;

MIRRORS;

EID: 84864579675     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2190713     Document Type: Article

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