A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 623-626

  Chae, Junseok ^a   Kulah, Haluk ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

g accelerometer; Inertial sensors; Sigma delta

Indexed keywords

ACCELEROMETERS; CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; DAMPING; REACTIVE ION ETCHING; READOUT SYSTEMS; SENSITIVITY ANALYSIS;

INERTIAL SENSORS; INTERFACE CIRCUIT; MICROACCELEROMETER; SILICON-ON-GLASS;

MICROSENSORS;

EID: 0036124337     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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