Characterization of transfer bonded silicon bolometer arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5406, Issue PART 2, 2004, Pages 521-530

  Niklaus, Frank ^a   Pejnefors, Johan ^b   Dainese, Matteo ^a,b   Häggblad, Michael ^a   Hellström, Per Erik ^a   Wållgren, Ulf ^b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b FLIR Systems Inc   (United States)

Author keywords

CMOS compatible; Polycrystalline silicon bolometer; Transfer bonding; Uncooled FPA

Indexed keywords

CAVITY RESONATORS; CMOS INTEGRATED CIRCUITS; COST EFFECTIVENESS; HIGH TEMPERATURE EFFECTS; INFRARED DETECTORS; INTEGRATED CIRCUITS; MICROELECTRONIC PROCESSING; POLYSILICON;

CMOS COMPATIBLE; MONOLITHIC INTEGRATION; TRANSFER BONDING; UNCOOLED FPA;

BOLOMETERS;

EID: 10044228537     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.565894     Document Type: Conference Paper

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