MEMS-based uncooled infrared bolometer arrays - A review

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6836, Issue , 2008, Pages

  Niklaus, Frank ^a,b   Vieider, Christian ^c   Jakobsen, Henrik ^d  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b FAUN AB   (Sweden)

^c Aereo AB   (Sweden)

^d UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

Author keywords

Focal plane array; FPA; Infrared detector; IR; MEMS; Microbolometer; Uncooled infrared bolometer arrays

Indexed keywords

(100) SILICON; (OTDR) TECHNOLOGY; BOLOMETER ARRAYS; CURRENT STATE; DESIGN APPROACHES; HISTORICAL DEVELOPMENTS; IMAGING CHIPS; INFRARED (IR); INFRARED IMAGING SYSTEMS; LATEST TECHNOLOGY; MARKET VOLUMES; MEMS/MOEMS; NIGHT VISION; PERFORMANCE LEVEL (PL); PERFORMANCE PARAMETERS; PHOTON DETECTORS; SILICON DIODES; SILICON GERMANIUM (SI GE); UNCOOLED INFRARED; VANADIUM (V) OXIDES;

AMORPHOUS SILICON; ARCHITECTURAL DESIGN; BOLOMETERS; COMPUTER NETWORKS; DIODES; FIBER OPTIC SENSORS; GERMANIUM; IMAGING SYSTEMS; IMAGING TECHNIQUES; INFRARED DETECTORS; INFRARED DEVICES; INFRARED IMAGING; METAL ANALYSIS; METALS; METEOROLOGICAL INSTRUMENTS; MULTITASKING; NONMETALS; OPTICS; OPTOELECTRONIC DEVICES; OXIDES; PHOTONS; PIGMENTS; REMOTE SENSING; SEMICONDUCTING SILICON COMPOUNDS; SILICON; TECHNOLOGY; THERMOGRAPHY (IMAGING); TRANSITION METALS; VANADIUM; VANADIUM COMPOUNDS;

AMORPHOUS MATERIALS;

EID: 45549102129     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.755128     Document Type: Conference Paper

References (94)

1. Websters Dictionary.
2. A. Schaufelbuhl, N. Schneeberger, U. Munch, M. Waelti, O. Paul, O. Brand, H. Baltes, C. Menolfi, H. Qiuting, E. Doering, M. Loepfe, "Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array", Journal of Microelectromechanical Systems, Vol. 10, No.4, pp.503-510, 2001.
3. P. Murait, "Micromachined infrared detectors based on pyroelectric thin films", Reports on Progress in Physics, Vol.64, pp.1339-1388, 2001.
4. R. Watton, "Ferroelectric IR bolometers - from ceramic hybrid arrays to direct thin film integration", Ferroelectrics, Vol.184, pp. 141-150, 1996.
5. E.S. Barr, "The Infrared Pioneers - III. Samuel Pierpont Langley", Infrared Physics, Vol.3, pp. 195-206, 1963.
6. C.B. Aiken, W.H. Carter, F.S. Philips, "The production of film type bolometers with rapid response", Review of Scientific Instruments, Vol.17, No.10, pp. 377-385, 1946.
7. B.H. Billings, E.E. Ban, W.L. Hyde, "Construction and characteristics of evaporated nickel bolometers", Review of Scientific Instruments, Vol.18, No.6, pp.429-435, 1947.
8. K. Yosihara, "An investigation of the properties of bolometers made by vacuum evaporation", Science of Light, Vol.5, No.2, pp.29, 1956.
9. R. A. Smith, F.E. Jones, R.F. Chasmar, The Detection and Measurement of Infrared Radiation, Clarendon Press, Oxford, 1957.
10. W. R. Blevin, W.J. Brown, "Large-area bolometers of evaporated gold", Journal of Scientific Instruments, Vol.42, No.l, pp.19, 1965.
11. J. Gosch, "Thin-film enhances bolometer's sensitivity", Electronics, pp.74-76, Feb. 28, 1980.
12. R. Hartmann, M. Selders, "High-sensitivity thin-film bolometers", Proc. Sensor 1982 - Sensor Technology and Temperature Measurement, pp. 102-116, Essen, West Germany.
13. K.C. Liddiard, "Thin-film resistance bolometer IR detectors", Infrared Physics, Vol.24, pp.57-64, 1984.
14. K.C. Liddiard, "Thin-film resistance bolometer IR detectors - II", Infrared Physics, Vol.26, pp.43-49, 1986.
15. R.A. Wood, J. Carney, R.E. Higashi, T. Ohnstein, J. Holmen, "Advances in uncooled silicon monolithic IR 2D arrays", Proc. IRIS DSG, 1988.
16. R.A. Wood, R.A. Carlson, R.E. Higashi, N.A. Foss, "Progress in silicon monolithic uncooled IR focal plane arrays", Proc. IRIS DSG, 1989.
17. R.A. Wood, B.E. Cole, N.A. Foss, C.J. Han, R.E. Higashi, R. Lubke, "Monolithic silicon uncooled focal plane development for high density array development program (HIDAD)", Proc. IRIS DSG, 1990.
18. R.A. Wood, B.E. Cole, C.J. Han, R.E. Higashi, "Monolithic silicon uncooled focal planes for the HIDAD program", Proc. IRIS DSG, 1991.
19. R.A. Wood, B.E. Cole, C.J. Han, R.E. Higashi, D. Nielsen, A. Weinstein, "HIDAD - a monolithic silicon uncooled infrared imaging focal plane", Proc. GOMAC, 1991.
20. R.A. Wood, C.J. Han, P.W. Kruse, "Integrated uncooled infrared detector imaging arrays", Proc. Solid-State Sensor and Actuator Workshop 1992, pp.132-135, Hilton Head Island, USA.
21. R.A. Wood, N.A. Foss, "Micromachined bolometer arrays achieve low-cost imaging", Laser Focus World, pp. 101-106, June, 1993.
22. R.A. Wood, "Monolithic silicon microbolometer arrays", in P.W. Kruse, D.D. Skatrud, Semiconductors and Semimetals, Vol.47, pp.45-121, Academic Press, San Diego, USA, 1997.
23. P.W. Kruse, "Uncooled IR focal plane arrays", Opto-Electronics Review, No.7, pp.253-258, 1999.
24. R.A. Wood, "Uncooled microbolometer infrared sensor arrays", in P. Capper, C.T. Elliott, Infrared Detectors and Emitters: Materials and Devices, pp. 149-174, Kluwer Academic Publishers, Boston, USA, 2000.
25. P.W. Kruse, Uncooled Thermal Imaging. Arrays, Systems, and Applications, SPIE Press, Bellingham, USA, 2001.
26. T. Akin, "CMOS-based Thermal Sensors", in H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. Korvink, O. Tabata, Advanced Micro and Nanosystems, Vol.2, pp.280-498, CMOS - MEMS, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, CH, 2005.
27. A. Rogalski, Infrared Detectors, Gordon and Breach Science Publishers, Amsterdam, The Netherlands, 2000.
28. A Rogalski, "Infrared detectors: an overview", Infrared Physics and Technology, Vol.43, pp.187-210, 2002.
29. A. M. Filachev, V. P. Ponomarenko, I. I. Taubkin, M. B. Ushakova, "Infrared focal plane arrays: state of the art and development trends", Proc. SPIE 2003, Vol. 5126, pp. 52-85, Moscow, Russia.
30. Source: U.S. Navy, http://en.wikipedia.org/wiki/Infrared.
31. G.T.A Kovacs, Micromachined transducers sourcebook, McGraw-Hill, Boston, USA, 1998.
32. M. Kohin, N. Buttler, "Performance limits of uncooled VOx microbolometer focal plane arrays", Proc. SPIE 2004, Vol. 5406, pp. 447-453, Orlando, USA.
33. C. Li, G.D. Skidmore, C. Howard, C.J. Han, L. Wood, D. Peysha, E. Williams, C. Trujillo, J. Emmett, G. Robas, D. Jardine, C.-F. Wan, E. Clarke "Recent development of ultra small pixel uncooled focal plane array at DRS, Proc. SPIE 2007, Vol.6542, pp.1Y.1-1Y.12, Orlando, USA.
34. P.L. Marasco, E.L. Dereniak, "Uncooled infrared sensor performance", Proc. SPIE 1993, Vol.2020, pp.363-378, San Diego, USA.
35. V.Y. Zerov, V.G. Malyarov, I.A. Khrebtov, "Calculational modeling of the main characteristics of an uncooled linear microbolometer array", Journal of Optical Technology, Vol.7, No.3, pp. 153-157, 2004.
36. P.W. Kruse, "Can the 300 K radiating background noise limit be attained by uncooled thermal imagers?", Proc. SPIE 2004, Vol.5406, pp.437-446, Orlando, USA.
37. E. Mottin, A. Bain, J.L. Martin, J.L. Ouvrier-Buffet, S. Bisotto, J.J. Yon, J.L. Tissot, "Uncooled amorphous silicon technology enhancement for 25 μm pixel pitch achievement", Proc. SPIE 2003, Vol.4820, pp.200-207, Seattle, USA.
38. F. Niklaus, C. Jansson, A. Decharat, J.-E. Källhammer, H. Pettersson, G. Stemme, "Uncooled Infrared Bolometer Arrays Operating in a Low to Medium Vacuum Atmosphere: Performance Model and Tradeoffs", Proc. SPIE 2007, Vol.6542, pp.1M.1-1M.12, Orlando, USA.
39. F. Niklaus, A. Decharat, C. Jansson, G. Stemme, "Performance Model for Uncooled Infrared Bolometer Arrays and Performance Predictions of Bolometers Operating at Atmospheric Pressure", Infrared Physics and Technology, http://dx.doi.org/10.1016/i.infrared.2007.08.001.2007, in press.
40. R. Richwine, R. Balceraka, C. Rapach, K. Freyvogel, A. Soodb, "A comprehensive model for bolometer element and uncooled array design and imaging sensor performance prediction", Proc. of SPIE 2006, Vol.6294, pp.62940F1-62940F11.
41. B. Backer, M. Kohin, A. Leary, R. Blackwell, R. Rumbaugh, "Advances in uncooled technology at BAE systems", Proc. SPIE 2003, Vol.5074, pp.548-556, Orlando, USA.
42. D. Murphy, M. Ray, J. Wyles, J. Asbrock, C. Hewitt, R. Wyles, E. Gordon, T. Sessler, A. Kennedy, S. Baur, D. Van Lue, "Performance improvements for VOx microbolometer FPAs", Proc. SPIE 2004, Vol.5406, pp.531-540, Orlando, USA.
43. R. J. Blackwell, T. Bach, D. O'Donnell, J. Geneczko, M. Joswick, "17 μm pixel 640 × 480 microbolometer FPA development at BAE Systems", Proc. SPIE 2007, Vol.6542, pp.65421U, Orlando, USA.
44. D. Murphy, M. Ray, J. Wyles, C. Hewitt, R. Wyles, E. Gordon, K. Almada, T. Sessler, S. Baur, D. Van Lue, S. Black, "640 × 512 17 μm microbolometer FPA and sensor development", Proc. SPIE 2007, Vol.6542, pp.65421Z, Orlando USA.
45. J.J. Yon, L. Biancardini, J.L. Tissot, L. Letellier, "Infrared microbolometer sensors and their application in automotive safety", Proc. AMAA 2003, pp. 1-15, Berlin, Germany.
46. S. Tohyama, M. Miyoshi, S. Kurashina, N. Ito, T. Sasaki, A. Ajisawa, N. Oda, "New thermally isolated pixel structure for high-resolution uncooled infrared FPAs", Proc. SPIE 2004, Vol. 5406, pp. 428-436, Orlando, USA.
47. D. Murphy, M. Ray, J. Wyles, J. Asbrock, C. Hewitt, R. Wyles, E. Gordon, T. Sessler, A. Kennedy, S. Baur, D. Van Lue, "Performance improvements for VOx microbolometer FPAs", Proc. SPIE 2004, Vol. 5406, pp. 531-540, Orlando, USA.
48. F. Niklaus, J. Pejnefors, M. Dainese, M. Haggblad, P.-E. Hellström, U.J. Wallgren, G. Stemme, "Characterization of transfer-bonded silicon bolometer arrays", Proc. SPIE 2004, Vol.5406, pp.521-530, Orlando, USA.
49. P. Eriksson, J.Y. Andersson, G. Stemme, "Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors", Journal of Microelectromechanical Systems, Vol.6, No.1, pp.55-61, 1997.
50. S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, T. Akin, "Low-cost uncooled infrared detectors in CMOS process", Sensors &Actuators A, Vol.109, pp.102-113, 2003.
51. F. Niklaus, E. Kälvesten, G. Stemme, "A new concept for CMOS-compatible fabrication of uncooled infrared focal plane arrays using wafer-scale device transfer bonding", Proc. SPIE 2001, Vol.4369, pp.397-404, Orlando, USA.
52. F. Niklaus, E. Kälvesten, G. Stemme, "Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays", Journal of Micromechanics and Microengineering, Vol.11, pp.509-513, 2001.
53. J.-E. Källhammer, H. Pettersson, D. Eriksson, S. Junique, S. Savage, C. Vieider, J.Y. Andersson, F. Niklaus, G. Stemme, "Fulfilling the pedestrian protection directive using a long-wavelength infrared camera designed to meet the performance and cost targets", Proc. SPIE 2006, Vol.6198, pp.74-84, Strasbourg, France.
54. C. Vieider, S. Wissmar, P. Ericsson, U. Halldin, F. Niklaus, G. Stemme, J.-E. Källhammer, H. Pettersson, D. Eriksson, H. Jakobsen, T. Kvistenay, J. Franks, J. VanNylen, H. Vercammen, A. VanHulsel, "Low-cost far infrared bolometer camera for automotive use", Proc. SPIE 2007, Vol.6542, pp. 1L.1-1L.10, Orlando, USA.
55. T. Kvisterøy, H. Jakobsen, C. Vieider, S. Wissmar, P. Ericsson, U. Halldin, F. Niklaus, F. Forsberg, G. Stemme, J.-E. Källhammer, H. Pettersson, D. Eriksson, J. Franks, J. VanNylen, H. Vercammen, A. VanHulsel, "Far infrared low-cost uncooled bolometer for automotive use", Proc. AMAA 2007, Berlin, Germany.
56. F. Niklaus, G. Stemme, J.-Q. Lu, R.J. Gutmann, "Adhesive wafer bonding", Journal of Applied Physics: Applied Physics Reviews, Vol. 99, No. 3, pp.031101/1-031101/28, 2006.
57. C. Chen, X. Yi, J. Zhang et al., "Micromachined uncooled IR bolometer linear array using VO2 thin films", International Journal of Infrared and Millimeter Waves, Vol.22, No.1, pp.53-58, 2001.
58. C. Chang-hong, Y. Xin-jian, X. Bi-feng, "Infrared responsivity of uncooled VO∼2-based thin films bolometer", Acta physica Sinica., Vol.50, Part 3, pp.450-452, 2001.
59. N. Oda, Y. Tanaka, T. Sasaki, A. Ajisawa, A. Kawahara, S. Kurashina, "Performance of 320 × 240 bolometer-type uncooled infrared detector", NEC Research & Development., Vol.44, No.2, 2003.
60. S. Chen, H. Ma, S. Xiang, X. Yi, "Fabrication and performance of microbolometer arrays based on nanostructured vanadium oxide thin films", Smart Mater. Struct., Vol.16, pp.696-700, 2007.
61. R. T. R. Kumar, B. Karunagaran, D. Mangalaraj, S. K. Narayandass, P. Manoravi, M. Joseph and V. Gopal, "Study of a pulsed laser deposited vanadium oxide based microbolometer array", Smart Mater. Struct., Vol.12, pp. 188-192, 2003.
62. Y-H. Han, I.-H, Choi, H-K. Kang, J.-Y. Park, K-T. Kim, H-J. Shin and S. Moon, "Fabrication of vanadium oxide thin film with high-temperature coefficient of resistance using V205/V/V205 multi-layers for uncooled microbolometers", Thin Solid Films, Vol.425, No. 1-2, pp.260-264, 2003.
63. Y. Lv, M. Hu, M. Wu and Z. Liu, "Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process", Surface and Coating Technology, Vol. 201, pp.4969-4972, 2007.
64. Y-H. Han, K-T. Kim, H-J. Shin, S. Moon, "Enhanced characteristics of an uncooled microbolometer using vanadium-tungsten oxide as a thermometric material", Applied Physics Letters, Vol.86, pp.254101-3, 2005.
65. N. Chi-Anh, H-J. Shin, K. Kim et. al, "Characterization of uncooled bolometer with vanadium tungsten oxide infrared active layer", Sensors and Actuators A: Physical, Vol.123, pp.87-92, 2005.
66. N. Chi-Anh, S. Moon: "Excess noise in vanadium tungsten oxide bolometric material", Infrared Physics & Technology, Vol.50, No.1, pp.38-41, 2007.
67. M. Soltani, M. Chaker, E. Haddad, R. V. Kruzelecky, J. Margot, "Effects of Ti-W codoping on the optical and electrical switching of vanadium dioxide thin films grown by a reactive pulsed laser deposition", Applied Physics Letters, Vol.85, No. 11, pp. 1958-1960, 2004.
68. A. J. Sylaios, T. R. Schimert, R. W. Gooch, W. L. McCardel, B. A. Ritchey, J. H. Tregilgas, "Amorphous silicon microbolometer technology", Proc. MRS 2000, Vol.609, A14.4.1-6.
69. A. Heredia, F.J. De la Hidalga, A. Tones, A. Jaramillo, "Low temperature electrical properties of a boron-doped amorphous silicon bolometer", Proc. The Electrochemical Society 2003, Abs.881.
70. L. Dong, R. Yue, L. Liu, "Fabrication and characterization of integrated uncooled infrared sensor arrays using a-Si thin-film transistors as active elements", Journal of Microelectromechanical Systems, Vol.14, No.5, pp.1167-1177, 2005.
71. L. Dong, R.F. Yue, L.T. Liu, "A high performance single-chip uncooled a-Si TFT infrared sensor", Proc. Transducers 2003, Vol.1, pp.312-315.
72. M. Mansi, M. Brookfield, S. Porter, I. Edwards, B. Bold, J. Shannon, P. Lambkin, A. Mathewson. "AUTHENTIC: a very low-cost infrared detector and camera system", Proc. SPIE 2003, Vol.4820, pp.227-238.
73. A. Tanaka, S. Matsumoto, N. Tsukamoto, S. Itoh, K. Chiba, T. Endoh, A. Nakazato, K. Okuyama, Y. Kumazawa, M. Hijikawa, H. Gotoh, T. Tanaka, N. Teranishi, "Infrared focal plane array incorporating silicon IC process compatible bolometer", IEEE Transactions on Electron Devices, Vol.43, No.11, pp. 1844-1850, 1996.
74. E. Iborra, M. Clement, L. Herrero, "Sangrador IR uncooled bolometers based on amorphous GeSiO on silicon micromachined structures", Journal of Microelectromechanical Systems, Vol. 11, No.4, pp.322-329, 2002.
75. D. Butler, M. Rana, "Radio Frequency sputtered SiGe and SiGeO thin films for uncooled infrared detectors", Thin Solid Films, Vol.514, No.1-2, pp.355-360, 2006.
76. A. Ahmed, R. Tait, "Noise behavior of amorphous GeSiO for microbolometer applications", Infrared Physics and Technology, Vol.46, No.6, pp.468-472, 2005.
77. M. Moreno, A. Kosarev, A. Torres, R. Ambrosio, "Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer", Thin Solid Films, Vol.515, No.19, pp.76070-7610, 2007.
78. V. Leonov, N. Perova, P. De Moor, B. Du Bois, C. Goessens, B. Grietens, A. Verbist, C. Van Hoof, J. Vermeiren, "Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy", Proc. SPIE 2003, Vol.4945, pp.54-63.
79. I. Chistokhin, I. Michailovsky, B. Fomin, E. Cherepov, "Polycrystalline layers of silicon-germanium alloy for uncooled IR bolometers", Proc. SPIE 2003, Vol.5126, No.1, pp.407-414.
80. R. Yue, L. Dong; L. Liu, "Monolithic uncooled 8×8 bolometer arrays based on poly-SiGe thermistor", International Journal of Infrared and Millimeter Waves, Vol.27, No.7, pp.995-1003.
81. S. Wissmar, L. Hoglund, J. Andersson, C. Vieider, S. Susan, P. Ericsson, "High signal to noise ratio quantum well bolometer materials", Proc. SPIE 2006, Vol.6401, Stockholm, Sweden.
82. T. Ichihara, Y. Watabe, Y. Honda, K. Aizawa, "A high performance amorphous Sil-xCx:H thermistor bolometer based on micro-machined structure", Proc. Tranducers 1997, Vol.2, pp. 1253-1256.
83. H. Lee, S. Myong, K. Lim, E. Yoon, "Electrical properties of photo-CVD boron-doped hydrogenated nanocrystalline silicon-carbide (p-nc-SiCH) films for uncooled IR bolometer applications", Journal of non-crystalline solids, Vol.316, No.2, pp.297-302, 2003.
84. M. Almasri, Z. Celik-Butler, D. Butler, A. Yaradanakul, A. Yildiz, "Semiconducting YBaCuO microbolometers for uncooled broad-band IR sensing", Proc. of the SPIE 2001, Vol.4369, pp.264-73.
85. L. Phong, S. Qiu, "Room temperature YBaCuO microbolometers" Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, Vol.18, No.2, pp.635-638, 2000.
86. J. Kim, A. Grishin, "Free-standing epitaxial La1-x(Sr,Ca)xMnO3 membrane on Si for uncooled infrared microbolometer", Applied Physics Letters, Vol.87, No.3, pp.33502-1-318, 2005.
87. M. Liger, Y-C. Tal, "A 32*32 parylene-pyrolyzed carbon bolometer imager", Proc. MEMS 2006, pp.106-109.
88. X. He, G. Karunasiri, T. Mei, W. J. Zeng, P. Neuzil, U. Sridhar, "Performance of microbolometer focal plane arrays under varying pressure", Electron Device Letters, Vol.21, No.5, pp.233-235, 2000.
89. V.K. Lindroos, M. Tilli, A. Lento, T. Motooka: Handbook of Silicon Based MEMS Materials and Technologies, to be published by William Andrew Publishing, 2008.
90. C. Jansson, U. Ringh, K. Liddiard, "Theoretical analysis of pulse bias heating of bolometers and effectiveness of pulse bias compensation", Proc. SPIE 1995, Vol.2552, pp.644-653, San Diego, USA.
91. C. Jansson, U. Ringh, K. Liddiard, N. Robinson, "FOA/DSTO uncooled IRFPA development", Proc. SPIE 1999, Vol.3698, pp.264-275, Orlando, USA.
92. W.J. Parrish, T. Woolaway, "Improvements in uncooled systems using bias equalization", Proc. SPIE 1999, Vol.3698, pp.748-755, Orlando, USA.
93. P. Manning, J. Gillham, N. Parkinson, T. Kaushal, "Silicon foundry micro-bolometers - The route to the mass-market thermal imager", Proc. of SPIE 2004, Vol.5406, pp.465-472.
94. C Trouilleau, B. Fieque, J. Tissot, P. Robert, A.Crastes, C. Minassian, O.Legras, B. Dupont, A.Touvignon, S. Tinnes, J. Yon, A. Arnaud, "Uncooled amorphous silicon 160 × 120 IRFPA with. 25 μm pixel-pitch for large volume applications", Proc. SPIE 2007, Vol.6542, pp.1V.1-1V.8, Orlando, USA.