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Volumn 4288, Issue , 2001, Pages 112-121
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An uncooled microbolometer infrared focal plane array in standard CMOS
a a a a |
Author keywords
CMOS sensors; Low cost microbolometers; Microbolometers; Uncooled infrared detectors
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Indexed keywords
ARRAYS;
CALCULATIONS;
CMOS INTEGRATED CIRCUITS;
COMPUTER SIMULATION;
ETCHING;
INFRARED DETECTORS;
INFRARED IMAGING;
MICROSENSORS;
READOUT SYSTEMS;
SEMICONDUCTING SILICON;
SINGLE CRYSTALS;
SPURIOUS SIGNAL NOISE;
FOCAL PLANE ARRAY;
MICROBOLOMETERS;
TEMPERATURE COEFFICIENT OF RESISTANCE;
BOLOMETERS;
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EID: 0034868782
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.429399 Document Type: Article |
Times cited : (18)
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References (18)
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