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Volumn 8, Issue 5, 1998, Pages 595-612

Electrochemical etch stop engineering for bulk micromachining

Author keywords

Bulk micromachining; Etch stop; Galvanic etch stop; Silicon etching

Indexed keywords

ANISOTROPY; ETCHING; MICROMACHINING;

EID: 0032136633     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00017-8     Document Type: Article
Times cited : (26)

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