New capacitive low-g triaxial accelerometer with low cross-axis sensitivity

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Hsu, Yu Wen ^a   Chen, Jen Yi ^a   Chien, Hsin Tang ^a   Chen, Sheah ^a   Lin, Shih Ting ^a   Liao, Lu Po ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR PHONE; CONSUMER GOODS; CROSS-AXIS SENSITIVITY; FUTURE APPLICATIONS; HIGH ASPECT RATIO; HIGH LINEARITY; HIGH RESOLUTION; HIGH SENSITIVITY; IN-PLANE; IN-PLANE ACCELEROMETER; OPERATING RANGES; OUT-OF-PLANE; PROOF MASS; SILICON-ON-GLASS; SINGLE STRUCTURE; TRIAXIAL ACCELEROMETER;

ASPECT RATIO; REACTIVE ION ETCHING;

ACCELEROMETERS;

EID: 77951979411     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055019     Document Type: Article

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