ALD-metal uncooled bolometer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 676-679

  Yoneoka, S ^a   Liger, M ^b   Yama, G ^b   Schuster, R ^b   Purkl, F ^b   Provine, J ^a   Prinz, F B ^a   Howe, R T ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROPERTY; METAL THIN FILM; PLATINUM FILMS; THERMAL CONDUCTANCE; UNCOOLED; UNCOOLED INFRARED BOLOMETERS;

ATOMIC LAYER DEPOSITION; BOLOMETERS; DEPOSITION; INFRARED DETECTORS; MECHANICAL ENGINEERING; MECHANICS; MEMS; OPTICAL PROPERTIES; PLATINUM; REACTIVE ION ETCHING;

ELECTRIC PROPERTIES;

EID: 79953792789     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734515     Document Type: Conference Paper

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