An SOS MEMS Interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 27-36

  Tejada, Francisco ^a   Wesolek, Danielle M ^b   Lehtonen, John ^b   Mirragliota, Joseph A ^b   Andreou, Andreas G ^a   Osiander, Robert ^b  

^a Johns Hopkins University   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

Displacement measurement; Displacement sensor; Laser interferometry; Magnetometer; MEMS transduction; Microelectromechnical systems (MEMS); Mixer; Silicon on insulator (SOI); Silicon on sapphire (SOS)

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTERFEROMETERS; LASER APPLICATIONS; MAGNETOMETERS; OPTICAL SENSORS; OPTIMIZATION; PHOTODIODES; SILICON ON INSULATOR TECHNOLOGY; SILICON ON SAPPHIRE TECHNOLOGY; TRANSPARENCY;

DISPLACEMENT MEASUREMENT; DISPLACEMENT SENSORS; LASER INTERFEROMETERY; MEMS TRANSDUCTION; MIXERS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142728577     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530909     Document Type: Conference Paper

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