Technologies for cofabricating MEMS and electronics

Proceedings of the IEEE

Volumn 96, Issue 2, 2008, Pages 306-322

  Fedder, Gary K ^a   Howe, Roger T ^b   Liu, Tsu Jae King ^c   Quévy, Emmanuel P ^d  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Stanford University   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d Silicon Clocks Inc   (United States)

Author keywords

Integrated circuit fabrication; Microelectromechanical systems (MEMS); Micromachining

Indexed keywords

DIGITAL INTEGRATED CIRCUITS; ELECTROSTATIC ACTUATORS; ETCHING; MEMS; MICROELECTRONICS; MICROMACHINING; SIGNAL PROCESSING;

INTEGRATED CIRCUIT FABRICATION; INTEGRATED ELECTRONICS; INTEGRATED MICROSYSTEMS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO-ELECTRONIC DEVICES; MICRO-FABRICATION TECHNOLOGY; MICROMECHANICAL STRUCTURES; SENSING AND ACTUATING;

MICROELECTROMECHANICAL DEVICES;

EID: 54049083519     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2007.911064     Document Type: Article

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