MEMS technology development and manufacturing in a CMOS foundry

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 807-810

  Liu, C M ^a   Chou, Bruce C S ^a   Tsai, Robert Chin Fu ^a   Shen, Nick Y M ^a   Chen, Benior S F ^a   Cheng, Emerson C W ^a   Tuan, Hsiao Chin ^a   Kalnitsky, Alex ^a   Cheng, Sean ^a   Lin, Chung Hsien ^a   Chung, Tien Kan ^a   Chang, Kuei Sung ^a   Liu, Yi Shao ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

CMOS MEMS; MEMS Foundry Service

Indexed keywords

CMOS-MEMS; CUSTOMER PRODUCTS; MEMS TECHNOLOGY; MOTION SENSORS; PROCESS DEVELOPMENT;

ACTUATORS; FOUNDRY PRACTICE; MICROSYSTEMS; SOLID-STATE SENSORS;

MANUFACTURE;

EID: 80052125293     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969891     Document Type: Conference Paper

References (4)

1. http://www.isuppli.com/MEMS-and sensors/MarketWatch/Pages/MEMS-Market- Rebounds-in- 2010-Following-Two-Year-Decline.aspx
2. BMA020 datasheet, May 2008, http://dkc3.digikey.com/PDF/Marketing/Bosch- BMA020.pd f
3. MMA7660FC, Rev 7, Nov. 2009, http://www.freescale.com/files/sensors/doc/ data-sheet/MM A7660FC.pdf
4. LIS331DLM, Doc ID 15102 Rev 4, July 2009 http://www.st.com/stonline/ products/literature/ds/15102.pdf