Multi-band radio-frequency filters fabricated using polyimide-based membrane transfer bonding technology

Journal of Micromechanics and Microengineering

Volumn 20, Issue 9, 2010, Pages

  Matsumura, Takeshi ^a,b   Esashi, Masayoshi ^b   Harada, Hiroshi ^a   Tanaka, Shuji ^b  

^a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CENTER; CMOS COMPATIBLE; DIFFERENT MODES; DISK-TYPE; FILM BULK ACOUSTIC-WAVE RESONATORS; MEMSDEVICES; MULTI-BAND RADIO; PIEZOELECTRIC MEMS; SACRIFICIAL LAYER; THERMAL STABILITY; THERMOSETTING POLYIMIDES; TRANSFER BONDING; WHOLE PROCESS;

ACOUSTIC RESONATORS; ACOUSTICS; CHEMICAL RESISTANCE; CHEMICAL STABILITY; DISKS (STRUCTURAL COMPONENTS); FABRICATION; MEMBRANE TECHNOLOGY; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; RESONATORS; SILICON WAFERS; THERMOSETS; WINE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 77957847115     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/9/095027     Document Type: Article

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