A hybrid micro-accelerometer system with CMOS readout circuit and self-test function

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6040, Issue , 2005, Pages

  Chen, Weiping ^a   Chen, Hong ^a   Liu, Xiaowei ^a   Tan, Xiaoyun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

CMOS readout circuit; Differential capacitive; DRIE; Micro accelerometer

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; CONTROL NONLINEARITIES; REACTIVE ION ETCHING; READOUT SYSTEMS; SENSITIVITY ANALYSIS; SENSORS;

CMOS READOUT CIRCUIT; DIFFERENTIAL CAPACITIVE; DRIE; MICRO-ACCELEROMETER;

ACCELEROMETERS;

EID: 33644997682     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664131     Document Type: Conference Paper

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