Monolithically integrated surface micromachined touch mode capacitive pressure sensor

Sensors and Actuators, A: Physical

Volumn 80, Issue 3, 2000, Pages 224-232

  Guo, Shuwen ^a   Guo, Jun ^a   Ko, Wen H ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING;

CAPACITIVE PRESSURE SENSORS; INTEGRATED SENSORS; SURFACE MICROMACHINING;

SENSORS;

EID: 0033882073     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00344-1     Document Type: Article

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