MEMS-IC integration for RF and millimeterwave applications

35th European Microwave Conference 2005 - Conference Proceedings

Volumn 3, Issue , 2005, Pages 1475-1478

  Dubuc, D ^a   De Raedt, W ^b   Carchon, G ^b   Do, M N ^a   Fourn, E ^a   Grenier, K ^a   Plana, R ^a  

^a LAAS CNRS   (France)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MILLIMETER WAVES; MOS DEVICES;

MICROSYSTEMS; MILLIMETERWAVE FREQUENCIES; SYSTEM IN PACKAGE (SIP);

MICROELECTROMECHANICAL DEVICES;

EID: 33847121316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1610229     Document Type: Conference Paper

References (9)

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2. K. Lim, S. Pinel, M. Davis, A. Sutono, C.-H. Lee, D. Heo, A. Obatoynbo, J. Laskar, E. M. Tantzeris, R. Tummala, "RF-System-On-Package (SOP) for Wireless Communications", IEEE Microwave Magazine, March 2002, pp. 88-99
3. Joseph, A.J.; Dunn, J.; Freeman, G.; Harame, D.L.; Coolbaugh, D.; Groves, R.; Stein, K.J.; Volant, R.; Subbanna, S.; Marangos, V.S.; Onge, S.S.; Eshun, E.; Cooper, P.; Johnson, J.B.; Jae-Sung Rieh; Jagannathan, B.; Ramachandran, V.; Ahlgren, D.; Dawn Wang; Wang, X.; "Product applications and technology directions with SiGe BiCMOS" Solid-State Circuits, IEEE Journal of, Volume: 38 , Issue: 9 , Sept. 2003. Pages:1471-1478
4. J. S. Rieh, B. Jagannathan, H. Chen et al, "SiGe HBTs with Cut-off Frequency of 350 GHz", 2002 IEDM, pp. 771-774.
5. Joachim N. Burghartz "Status and Trends of Silicon RF Technology", Technical Digest ESSDERC, Sept. 13-15, 1999, Leuven, Belgium.John R. Long "integrating Passive Components and RF/MMIC Design", BCTM 2000 Short course
6. Joachim N. Burghartz "Integrated Multilayer RF Passives in Silicon Technology", Topical Meeting on Silicon monolithic integrated circuits in RF systems, 17-18 sept 1998, Ann Arbor, Michigan pp 141-147.
7. D. Dubuc, E. Tournier et al.: "High Quality Factor and High Self-Resonant Frequency Monolithic Inductor for Millimeter-Wave Si-based IC's", IEEE MTT-S, Seattle-USA, June 2002, pp 193-196.
8. G. Carchon, W. DeRaedt, B. Nauwelaers, "Integration of CPW Quadrature Couplers in Multilayer Thin-Film MCM-D", IEEE MTT, vol. 49, no10, October 2001, pp 1770-1776.
9. D. Dubuc, L. Rabbia, K. Grenier, P. Pons, O. Vendier, J. Graffeuil and R. Plana, 'Original MEMS-Based Single Pole Double Throw Topology for Millimeter Wave Space Communications', European Microwave Conference 2003. 6-10 October 2003. Munich, Germany.