CMOS-MEMS membrane for audio-frequency acoustic actuation

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 175-182

  Neumann Jr , John J ^a   Gabriel, Kaigham J ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Acoustics; CMOS; Membrane; MEMS

Indexed keywords

AUDIO ACOUSTICS; CMOS INTEGRATED CIRCUITS; EARPHONES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; SIGNAL PROCESSING;

ACOUSTIC MEMBRANE; AUDIO ACOUSTIC ACTUATORS; AUDIO FREQUENCY ACOUSTIC ACTUATION; SIGNAL PROCESSING ELECTRONICS;

ACTUATORS;

EID: 0036143032     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00728-2     Document Type: Article

References (6)

1. Laminated high-aspect-ratio microstructures in a conventional CMOS process
2. Piezoelectric cantilever microphone and microspeaker
3. Fabrication of piezoelectric acoustic transducers built on cantilever-like diaphragm
4. Parylene-diaphragm piezoelectric acoustic transducers
5. A CMOS z-axis accelerometer with capacitive comb-finger sensing
6. Mechanical property measurement of 0.5-μm CMOS microstructures