Optical IMEMS® - A fabrication process for MEMS optical switches with integrated on-chip electronics

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1638-1642

  Brosnihan, T J ^a   Brown, S A ^b   Brogan, A ^b   Gormley, C S ^b   Collins, D J ^a   Sherman, S J ^a   Lemkin, M ^a   Polce, N A ^c   Davis, M S ^c  

^a ANALOG DEVICES INC   (United States)

^b Analog Devices Inc UK   (United Kingdom)

^c Clare Inc   (United States)

Author keywords

Actuators; Consumer electronics; Integrated optics; Micromachining; Micromechanical devices; Mirrors; Optical devices; Optical fiber communication; Optical sensors; Silicon

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; CONSUMER ELECTRONICS; INTEGRATED OPTICS; MICROMACHINING; MICROSYSTEMS; MIRRORS; MOEMS; OPTICAL COMMUNICATION; OPTICAL DEVICES; OPTICAL FIBER COMMUNICATION; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL SENSORS; SILICON; SOLID-STATE SENSORS; TRANSDUCERS;

COMMUNICATIONS NETWORKS; FABRICATION PROCESS; MEMS OPTICAL SWITCHES; MICROMECHANICAL DEVICE; ON-CHIP ELECTRONICS; ON-CHIP HIGH VOLTAGE; PRECISION ALIGNMENT; SILICON MICROMACHINING;

OPTICAL SWITCHES;

EID: 84944728136     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217096     Document Type: Conference Paper

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