Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation

Journal of Manufacturing Science and Engineering

Volumn 132, Issue 3, 2010, Pages 0309171-03091716

  Sahu, Bijoyraj ^a   Taylor, Curtis R ^a   Leang, Kam K ^b  

^a University of Florida   (United States)

^b Reno   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; MANUFACTURE;

ELECTROSTATIC MICROACTUATORS; KEY CHARACTERISTICS; MANUFACTURING TOOLS; MICROACTUATOR DESIGN; NANOSCALE MANUFACTURING; NANOSCALE POSITIONING; PERFORMANCE CHARACTERIZATION; STATE OF THE ART;

NANOSTRUCTURED MATERIALS;

EID: 77955337953     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.4001662     Document Type: Article

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