Electrothermal responses of lineshape microstructures

Sensors and Actuators, A: Physical

Volumn 55, Issue 1, 1996, Pages 35-41

  Lin, Liwei ^a,b   Chiao, Mu ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrothermal response; Lineshapes; Surface micromachining

Indexed keywords

BUBBLE FORMATION; HEAT CONDUCTION; MATHEMATICAL MODELS; MICROMACHINING;

ELECTROTHERMAL RESPONSES; LINESHAPE MICROSTRUCTURES; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030182958     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01247-2     Document Type: Article

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