Polymeric thermal microactuator with embedded silicon skeleton: Part I - Design and analysis

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 809-822

  Lau, Gih Keong ^a,b   Goosen, Johannes F L ^a   van Keulen, Fred ^a   Chu Duc, Trinh ^c,d   Sarro, Pasqualina M ^d  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d VIETNAM NATIONAL UNIVERSITY   (Viet Nam)

Author keywords

Artificial muscle; Microelectromechanical systems (MEMS); Multiphysicsmodeling; Polymer actuators; Thermal actuators

Indexed keywords

ACTUATORS; APPROXIMATION THEORY; CANTILEVER BEAMS; CHLORINE COMPOUNDS; HEAT EXCHANGERS; HEAT TRANSFER; HEATING EQUIPMENT; MICROACTUATORS; NONMETALS; NUMERICAL METHODS; OPTIMIZATION; POLYMERS; SILICON; THERMAL EXPANSION; THERMAL SPRAYING; THERMOANALYSIS;

ACTUATION STRESS; ANALYTICAL AND NUMERICAL MODELS; APPROXIMATE MODELS; ARTIFICIAL MUSCLE; COMPLEX GEOMETRIES; DESIGN AND ANALYSIS; DESIGN OPTIMIZATION; EXPERIMENTAL TESTING; FINITE ELEMENT MODEL; FULLY COUPLED; MATERIAL COMPOSITIONS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MULTI-PHYSICS; MULTIPHYSICSMODELING; NEW DESIGN; PLANARITY; POLYMER ACTUATORS; RESPONSE TIME; SILICON SKELETON; THERMAL ACTUATORS; VOLUMETRIC THERMAL EXPANSION;

FINITE ELEMENT METHOD;

EID: 49149111550     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.924842     Document Type: Article

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