Force, deflection and power measurements of toggled microthermal actuators

Journal of Micromechanics and Microengineering

Volumn 14, Issue 1, 2004, Pages 49-56

  Lai, Yongjun ^a   McDonald, James ^a   Kujath, Marek ^a   Hubbard, Ted ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER MEASUREMENT; FORCE MEASUREMENT; KINEMATICS; NUMERICAL METHODS; SUBSTRATES; THERMAL EXPANSION;

DEFLECTION MEASUREMENT; DISPLACEMENT; EFFECTIVENESS; MICROTHERMAL ACTUATORS;

ACTUATORS;

EID: 0942290122     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/1/307     Document Type: Article

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