Electrothermal properties and modeling of polysilicon microthermal actuators

Journal of Microelectromechanical Systems

Volumn 12, Issue 4, 2003, Pages 513-523

  Geisberger, Aaron A ^a   Sarkar, Niladri ^a   Ellis, Matthew ^a   Skidmore, George D ^a  

^a ZYVEX CORPORATION   (United States)

Author keywords

Electrothermal microactuator; Modeling thermal actuator; Polysilicon material properties

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; NUMERICAL ANALYSIS; POLYSILICON; THERMAL CONDUCTIVITY; THERMAL EFFECTS; TRANSPORT PROPERTIES;

ELECTROTHERMAL PROPERTIES; POLYSILICON MICROTHERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0041386059     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.815835     Document Type: Article

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