Design of a six-axis micro-scale nanopositioner-μHexFlex

Precision Engineering

Volumn 30, Issue 3, 2006, Pages 314-324

  Chen, Shih Chi ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Compliant mechanism; Constraint based design; Flexure; HexFlex; Microfabrication; Nanopositioner; Six axis; Thermo mechanical actuator

Indexed keywords

CONSTRAINT THEORY; COSTS; ELECTRIC PROPERTIES; FABRICATION; MICROACTUATORS; THERMOMECHANICAL TREATMENT;

COMPLIANT MECHANISM; CONSTRAINT-BASED DESIGN; FLEXURE; HEXFLEX; MICROFABRICATION; NANOPOSITIONERS; SIX-AXIS; THERMO-MECHANICAL ACTUATORS;

NANOTECHNOLOGY;

EID: 33744936531     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.11.002     Document Type: Article

References (14)

1. Culpepper M.L., and Anderson G. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism. Prec Eng 28 (2004) 469-482
2. Jokiel B., Benavides G.L., Bieg L.F., and Allen J.J. Planar and spatial three-degree-of-freedom micro-stages in silicon MEMS. Proceedings of the 2001 annual meeting of the American Society for Precision Engineering (2001) 32-35
3. Bamberger H., and Shoham M. A New configuration of a six degree-of-freedom parallel robot for MEMS fabrication. Proceedings of the 2004 IEEE international conference on robotics and automation (2004) 4545-4550
4. Culpepper M.L. Design of quasi-kinematic couplings. Prec Eng 28 3 (2004) 338-357
5. Maxwell J.C. General considerations concerning scientific apparatus. The scientific papers of James Clerk Maxwell vol. 2 (1990), Dover Press 505-521
6. Slocum A. Design of three-groove kinematic couplings. Prec Eng 14 (1992) 67-73
7. Hale L.C., and Slocum A.H. Optimal design techniques for kinematic couplings. Prec Eng 25 (2001) 114-127
8. Guckel H., Klein J., Christenson T., Skrobis K., Laudon M., and Lovell E.G. Thermo-magnetic metal flexure actuators. Proceedings of solid-state sensor and actuator workshop (1992) 73-75
9. Garcia E., and Lobontiu N. Induced-strain multimorphs for microscale sensory actuation design. Smart Mater Struct 13 (2004) 725-732
10. Lide D.R., and Kehiaian H.V. CRC handbook of thermophysical and thermomechanical data (1994), CRC Press, Ann Arbor, MI
11. Huang Q., and Lee N. Analysis and design of polysilicon thermal flexure actuator. J Micromech Microeng 9 (1999) 64-70
12. Lott C.D., McLain T.W., Harb J., and Howell L. Thermal modeling of a surface-micromachined linear thermomechanical actuator. Model Sim Microsyst (2001) 370-373
13. Mankame N.D., and Anathasuresh G.K. Comprehensive thermal modeling and characterization of an electro-thermal-compliant microactuator. J Micromech Microeng 11 (2001) 452-462
14. Chen S., and Culpepper M.L. Compliant mechanisms for micro-scale spatial manipulators: applications in nanomanipulation. Proceedings of the 2004 annual meeting of the American Society for Precision Engineering (2004) 293-296