Electrothermally activated SU-8 microgripper for single cell manipulation in solution

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 857-863

  Chronis, Nikolas ^a   Lee, Luke P ^a  

^a University of California at Berkeley   (United States)

Author keywords

Polymer MEMS; Polymer microgripper; Single cell manipulation; SU 8 actuators

Indexed keywords

BIOCOMPATIBILITY; CELLS; ELECTRIC POTENTIAL; EPOXY RESINS; GRIPPERS; HIGH TEMPERATURE EFFECTS; MANIPULATORS; MICROACTUATORS; MICROELECTRONIC PROCESSING; MICROMACHINING; THERMAL EXPANSION;

ELECTROTHERMALLY ACTIVATED POLYMER; POLYMER MICROELECTROMECHANICAL SYSTEM; POLYMER MICROGRIPPER; SINGLE CELL MANIPULATION;

MICROELECTROMECHANICAL DEVICES;

EID: 27144488401     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845445     Document Type: Article

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