Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 178-183

  Zhou, Guangya ^a   Dowd, Philip ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES;

COMB-DRIVE ACTUATORS;

MICROACTUATORS;

EID: 0037340959     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/303     Document Type: Article

References (12)

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