Materials selection and design of microelectrothermal bimaterial actuators

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 248-259

  Prasanna, Srinivasan ^a   Spearing, S Mark ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Microactuators; Optimization; Performance and thermoelasticity

Indexed keywords

DESIGN; FINITE ELEMENT METHOD; MATERIALS; MICROACTUATORS; OPTIMIZATION; SURFACE MICROMACHINING; THERMOELASTICITY;

MATERIAL SELECTION; MICROELECTROTHERMAL BIMATERIAL ACTUATORS;

MEMS;

EID: 34147151769     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.889528     Document Type: Article

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