Optimal shape design of three-dimensional mems with applications to electrostatic comb drives

International Journal for Numerical Methods in Engineering

Volumn 45, Issue 2, 1999, Pages 175-194

  Ye, Wenjing ^a   Mukherjee, Subrata ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

Boundary element method; Comb drive; Micro electro mechanical systems; Optimal design

Indexed keywords

BOUNDARY ELEMENT METHOD; DIFFERENTIATION (CALCULUS); ELECTROSTATIC DEVICES; INVERSE PROBLEMS; MICROACTUATORS; OPTIMIZATION; PROBLEM SOLVING; SENSITIVITY ANALYSIS;

ELECTROSTATIC COMB DRIVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032683063     PISSN: 00295981     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0207(19990520)45:2<175::AID-NME585>3.0.CO;2-7     Document Type: Article

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