Modeling and control of electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 129, Issue 6, 2007, Pages 786-794

  Zhu, Guchuan ^a   Penet, Julien ^a   Saydy, Lahcen ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONTROL SYSTEMS; ERRORS; MATHEMATICAL MODELS; MICROACTUATORS; NUMERICAL METHODS; ROBUST CONTROL;

DYNAMICAL MODELS; ELECTROSTATICALLY ACTUATED; MODELING ERRORS; PARAMETER VARIATIONS;

MEMS;

EID: 36448982167     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2789469     Document Type: Article

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