Compliant electro-thermal microactuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 588-593

  Jonsmann, J ^a   Sigmund, O ^a   Bouwstra, S ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; IMAGE ANALYSIS; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RAPID PROTOTYPING;

ELECTROTHERMAL MICROACTUATORS; LASER MICROMACHINING;

MICROACTUATORS;

EID: 0032688946     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746894     Document Type: Conference Paper

References (6)