Aspects of fabrication and characterization of electro-thermal micro-actuators

Journal of the Brazilian Society of Mechanical Sciences and Engineering

Volumn 29, Issue 1, 2007, Pages 26-33

  De Godoy, Paulo Henrique ^b   Silva, Emílio Carlos Nelli ^a,b  

^a ABCM   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Displacement measurement; FE simulation; Force measurement; MEMS; Micro actuators

Indexed keywords

CCD CAMERAS; FINITE ELEMENT METHOD; FORCE MEASUREMENT; MEMS; VOLTAGE CONTROL;

DISPLACEMENT MEASUREMENT; ELECTRO-THERMAL MICRO-ACTUATORS (ETM); MICRO PROBE STATIONS;

MICROACTUATORS;

EID: 34548709242     PISSN: 16785878     EISSN: 18063691     Source Type: Journal    
DOI: 10.1590/s1678-58782007000100005     Document Type: Article

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