Design and modeling of a MEMS bidirectional vertical thermal actuator

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 841-850

  Yan, Dong ^a   Khajepour, Amir ^a   Mansour, Raafat ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); ELECTRIC CURRENTS; ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; THERMAL EXPANSION; THERMOANALYSIS; TUNING;

ACTIVE RETURN CURRENT PASS; ELECTRO-THERMAL ACTUATORS; HOT AND COLD ARMS; U-SHAPED ACTUATOR;

ACTUATORS;

EID: 3142734900     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/002     Document Type: Article

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