How slender can comb-drive fingers be?

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 1055-1059

  Elata, David ^a   Leus, Vitaly ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; FINITE ELEMENT METHOD; MICROMACHINING; ROTORS; SUSPENSIONS (COMPONENTS);

COMB-DRIVE FINGERS; COMB-DRIVE ROTORS; ELASTIC SUSPENSIONS; ELECTROMECHANICAL STABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 24144499160     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/023     Document Type: Article

References (12)

1. Senturia S D 2001 Microsystem Design (Boston: Kluwer)
2. Pelesko J A and Bernstein D H 2003 Modeling MEMS and NEMS (Boca Raton, FL: Chapman & Hall/CRC)
3. Tang W C, Nguyen T C H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Sensors Actuators 20 25-32
4. Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9
5. Elata D, Bochobza-Degani O and Nemirovsky Y 2003 Analytical approach and numerical alpha-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources J. Microelectromech. Syst. 12 681-91
6. Grade J D 1999 Large deflection, high speed, electrostatic actuators for optical switching applications Mechanical Engineering Stanford, p 232
7. Grade J D, Jerman H and Kenny T W 2003 Design of large deflection electrostatic actuators J. Microelectromech. Syst. 12 335-43
8. Zhou G Y and Dowd P 2003 Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators J. Micromech. Microeng. 13 178-83
9. Leus V and Elata D 2004 Fringing field effect in electrostatic actuators Technical Report ETR 2004-2 Technion-Israel Institute of Technology
10. Nguyen Q S 2000 Stability and Nonlinear Solid Mechanics (Chichester: Wiley)
11. Abu-Salih S and Elata D 2004 The effect of internal stress on the electromechanical buckling of a clamped-clamped beam European Micro and Nano Systems 2004 (Paris)
12. Bochobza-Degani O, Elata D and Nemirovsky Y 2002 An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devices J. Microelectromech. Syst. 11 612-20