A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 451-457

  Kanamori, Y ^a   Yahagi, H ^a,b   Hane, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b KYOCERA CORPORATION   (Japan)

Author keywords

MEMS; Microtranslation table; Scratch drive actuator; Silicon on insulator

Indexed keywords

MEMS; MICROTRANSLATION TABLE; SCRATCH-DRIVE ACTUATORS; SILICON-ON-INSULATOR;

ELECTRIC POTENTIAL; ETCHING; MICROELECTROMECHANICAL DEVICES; SILICA; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THIN FILMS;

ACTUATORS;

EID: 29144456694     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.06.017     Document Type: Article

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