Analysis of the extended operation range of electrostatic actuators by current-pulse drive

Sensors and Actuators, A: Physical

Volumn 90, Issue 3, 2001, Pages 181-190

  Castaner, L ^a   Pons, J ^a   Nadal Guardia, R ^a   Rodriguez, A ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Current drive; Operation range of electrostatic actuators

Indexed keywords

ACTUATORS; CAPACITANCE; DIFFERENTIAL EQUATIONS; ECONOMIC AND SOCIAL EFFECTS; ELECTROSTATIC FORCE; ELECTROSTATICS; HIGH LEVEL LANGUAGES; STABILITY;

CURRENT DRIVES; EQUILIBRIUM POSITIONS; EXTENDED OPERATIONS; HIGH LEVEL DESCRIPTION; OPERATION RANGE; PARASITIC CAPACITANCE; PULL-IN INSTABILITY; PULSED CURRENT SOURCES;

ELECTROSTATIC ACTUATORS;

EID: 0001434294     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00525-8     Document Type: Article

References (19)

1. K.E. Petersen. Micro mechanic al membrane switches on silicon, IBM J. Res. Dev. 23 (4) (1979) 376-385.
2. J. Drake. H. Jennan. B. Lutze. M. Stuber. An electrostatically actuated microrrlay, in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers '95). Vol.2. Stockholm, 1995. pp. 380-383.
3. M.A. Gretillat, P. Thiebaud, C. Under, N.F. de Rooij, Integraled circuit compatible electrostatic polysilicon microrelays, J. Micro- mech. Microeng. 5 (1995) 155-160.
4. A. Dee, K. Suyama. Micromachined electromechanically tunable capacitors and their applications to RF ICs. IEEE Trans. Microwave Theor. Tech. 46 (12) (1988) 2587-2596.
5. J.J. Yao, M.E Chang. A surface micromachined miniature switch for telecommunications applications with signal frequencies from dc up to 4 GHz. in: Proceedings of the International Conference on Solid- Slate SensoiN and Actuators (Transducers '95). Vol.2. Stockholm. pp. 384-387.
6. D.J. Young, B. Boser, A micromachined variable capacitor for monolithic low noise VCOs. in: Technical Digest on Solid-State Sensors and Actuators Workshop. Hilton Head Island. SC. 3-6 June. pp. 86-89.
7. H.C. Nathanson, WE. Nevel, RA. Wtckslrom, J.R. Davis Jr.. The resonant gate transistor. IEEE Trans. Electron Devices ED-14 (1967) 117-133.
8. J.I. Seeger, S.B. Craiy. Stabilization of electrostatically actuated mechanical devices, in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers'97). 1997, pp. 1133-1136.
9. E.K. Chan, R.W. Dutton. Electrostatic micromechanical actuator with extended range of trawl. IEEE J. Microelectromech. Syst. 9 (3) (2000) 321-328.
10. E.S. Hung, S.D. Senturia. Extending the trawl range of analog tuned electrostatic actuators. IEEE J. Microelectromech. Syst. 8 (4) (1999) 497-505.
11. J.M. Kyynarainen, A.S. Oja, H. Seppii. Increasing the dynamic range of a micromechanical moving-plate capacitor. Symposium on Desiga Test Integration and Packaging of MEMS/MOEMS. Proc. SPIE 4019 (2000) 78-89.
12. J.I. Seeger, BE. Boser. Dynamics and control of parallel- plate actualors beyond the electrostatic unstability. in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducer. 99), Sendai. Japan. June 1999, pp.
13. L. Cas Liner, S.D. Senturia. Speed-energy optimization of electrostatic actuators based tin pull-in. IEEE J. Microclectmmech. Syst. 8 (3) (1999) 290-298.
14. C. Tornazou, J.B. Hughes, N.C. Baitersby. (Eds.), Switched CuiTenLs: An Analog Technique for Digital Technology, Peregnnus (Peter), London UK. 1993.
15. J.M. de la Rosa, B. Perez-Verdu, R. del Rio, A. Rodnguez-Vazquez, A CMOS 0.8 prn transistor-only 1.63 MHz switched-current bandpass: Z.1 modulator for AM signal A/D conversion, IEEE J. Solid-Slate CircuiLs 35 (8) (2000) 1220-1226.
16. SaberDesigner Reference Manual. Release 4.3, Analogy Inc., Beaverton. OR. 1998.
17. L. Castaner, A. Rodriguez, J. Pons, S.D. Senturia. Pull-in time-energy product of electrostatic actuators: comparison of experiments with simulation. Sens. Actuators A 83 (1-3) (2000) 263-269.
18. L. Castaner, A. Rodriguez, J. Pons, S.D. Senturia. Measurement of power-speed product in electrostatic actuators. in: Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai. Japan. June 1999, pp. 1772-1775.
19. Y. Tsividis. Operation and Modelling of the MOS Transistor. 2nd Edition. McGraw-Hill. New York, 1999.