Design and analysis of planar compliant microgripper based on kinematic approach

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 143-156

  Tsai, Ying Chien ^a   Lei, Sio Hou ^a   Sudin, Hendra ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; JOINTS (STRUCTURAL COMPONENTS); KINEMATICS; MICROELECTRONICS; MICROSTRUCTURE; STIFFNESS; STRESS ANALYSIS; STRESSES;

COMPLAINT JOINTS; MICRO-SCALE ACTUATING DEVICES; MICROGRIPPERS; SMART MEMORY ALLOYS (SMA);

MICROELECTROMECHANICAL DEVICES;

EID: 12344313088     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/022     Document Type: Article

References (30)

1. Ballandras S et al 1995 Microgrippers realized by LIGA techniques Emerging Technologies and Factory Automation, ETFA Proc., INRIA/IEEE Symp. vol 2 pp 271-4
2. Basrour S, Robert L, Ballandras S and Hauden D 1997 Mechanical characterization of microgrippers realized by LIGA technique Solid State Sensors Actuators 1 599-602
3. Belfiore N P and Pennestri E 1997 An atlas of linkage-type robotic grippers Mech. Mach. Theory 32 811-33
4. Carrozza M, Menciassi A, Tiezzi G and Dario P 1998 The development of a LIGA-microfabricated gripper for micromanipulation tasks J. Micromech. Microeng. 8 141-3
5. Chiao M and Lin L W 2000 Self-buckling of micromachined beams under resistive heating J. Microelectromech. Syst. 9 146-51
6. Dong Yan, Khajepour A and Mansour R 2003 Modeling of two-hot-arm horizontal thermal actuator J. Micromech. Microeng. 13 312-22
7. Greitmann G and Buser R A 1996 Tactile microgripper for automated handling of microparts Sensors Actuators A 53 410-5
8. Her I and Chang J C 1994 A linear scheme for the displacement analysis of micropositioning stages with flexure hinges ASME J. Mech. Des. 116 770-6
9. Her I and Midha A 1987 A compliance number concept for compliant mechanisms, and type synthesis ASME J. Mech., Transmissions Type Synthesis 109 348-55
10. Huang Q A and Lee N K S 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64-70
11. Keller C G and Howe R T 1995 Nickel-filled thermally actuated tweezers Transducer 8th Int. Conf. on Solid-State Sensors and Actuators and Eurosensors IX (Stockholm, Sweden, June 25-29) vol 2 pp 552-5
12. Keller C G and Howe R T 1997 Hexsil tweezers for teleoperated microassembly IEEE 10th Int. Workshop on Micro Electromechanical Systems (Nagoya, Japan) pp 72-7
13. Kim C J, Pisano A and Muller R 1992 Silicon-processed overhanging microgripper J. Microelectromech. Syst. 1 31-6
14. Kohl M, Just E, Pfleging W and Miyazaki S 2000 SMA microgripper with integrated antagonism Sensors Actuators A 83 208-13
15. Lee A P, Ciarlo D R, Krulevitch P A, Lehew S, Trevino J and Northrup M A 2000 A practical microgripper by fine alignment, eutectic bonding and SMA actuation Sensors Actuators A 54 208-13
16. Lerch P, Slimane C K, Romanowicz B and Renaud P 1996 Modelization and characterization of asymmetrical thermal micro-actuators J. Micromech. Microeng. 6 134-7
17. Long Q, Park J S and Gianchandani Y B 2001 Bent-beam electrothermal actuators - Part I: single beam and cascaded devices J. Microelectromech. Syst. 10 247-54
18. Mankame N D and Ananthasuresh G K 2001 Comprehensive thermal modeling and characterization of an electro-thermal-compliant microactuator J. Micromech. Microeng. 11 1-11
19. McConnell A D, Uma S and Goodson K E 2001 Thermal conductivity of doped polysilicon layers J. Microelectromech. Syst. 10 360-9
20. Nogimori W, Irisa K, Ando M and Naruse Y 1997 A laser-powered microgripper Proc. IEEE 10th Ann. Int. Workshop pp 267-71
21. Paros L M and Weisbord L 1965 How to design flexure hinges Mach. Design. 37 151-6
22. Salim R, Wurmus H, Harnisch A and Hulsenberg D 1997 Microgrippers created in microstructurable glass Microsyst. Technol. 4 32-4
23. Seidemann V, Butefisch S and Buttgenbach S 2002 Sensors Actuators A 97-98 457-61
24. Seki H 1992 Modeling and impedance control of a piezoelectric bimorph microgripper Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems pp 958-65
25. Sharpe W N, Yuan B and Vaidyanathan R 1997 Measurement of Young's modulus, Poisson's ratio, and tensile strength of polysilicon IEEE Int. Workshop on Microelectromechanical System (Nagoya, Japan) pp 424-9
26. Suzuki Y 1996 Flexible microgripper and its application to micro-measurement of mechanical and thermal properties IEEE MEMS Proc. 9th Ann. Int. Workshop pp 406-11
27. Timothy M and Ananthasuresh G K 2001 Micromechanical devices with embedded electro-thermal-compliant actuation Sensors Actuators A 90 38-48
28. Troisfontaine N, Bidaud P and Morel G 1997 A new inter-phalangeal actuator for dexterous microgrippers Proc. IEEE Int. Conf. on Robotics and Automation pp 1773-8
29. Uma S, McConnell A D, Asheghi M, Kurabayashi K and Goodson K E 2001 Temperature dependant thermal conductivity of undoped polycrystalline silicon layers Int. J. Thermophys. 22 605-16
30. Yan D, Khajepour A and Mansour R 2003 Modeling of two-hot-arm horizontal thermal actuator J. Micromech. Microeng. 13 312-22