Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 7-15

  Beyeler, Felix ^a   Neild, Adrian ^a   Oberti, Stefano ^a   Bell, Dominik J ^a   Sun, Yu ^b   Dual, Jürg ^a   Nelson, Bradley J ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

Capacitive force sensor; Electrostatic microgripper; Force feedback; Handling biological cells; HeLa cancer cells; Microelectromechanical systems (MEMS); Micromanipulation; Silicon on insulator (SOI) fabrication; Ultrasonic positioning

Indexed keywords

CELLS; MEMS; MICROMANIPULATORS; MONOLITHIC INTEGRATED CIRCUITS; SILICON ON INSULATOR TECHNOLOGY; ULTRASONIC DEVICES; ULTRASONICS;

CAPACITIVE FORCE SENSOR; ELECTROSTATIC MICROGRIPPER; FORCE FEEDBACK; ULTRASONIC POSITIONING;

GRIPPERS;

EID: 33947219854     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885853     Document Type: Article

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