Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes

Thin Solid Films

Volumn 515, Issue 12, 2007, Pages 4901-4904

  Jeon, Chang Seong ^a,b   Park, Joon Shik ^a   Lee, Sang Yeol ^b   Moon, Chan Woo ^a  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

MEMS; Micro gripper; Piezoelectric actuator; PZT cantilever

Indexed keywords

ADHESION; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; PIEZOELECTRIC ACTUATORS; POLYIMIDES; SOL-GELS;

GRIPPING CHARACTERISTICS; MICRO GRIPPERS; MICROCANTILEVERS; PZT CANTILEVERS;

GRIPPERS;

EID: 33947096389     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.062     Document Type: Article

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