Sub-micron metallic electrothermal actuators

Journal of Micromechanics and Microengineering

Volumn 15, Issue 2, 2005, Pages 322-327

  Lee, Jeong Soo ^a   Park, Daniel Sang Won ^a   Nallani, Arun Kumar ^a   Lee, Gil Sik ^a   Lee, Jeong Bong ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC POWER UTILIZATION; ELECTROMECHANICAL DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTROPLATING; FINITE ELEMENT METHOD; POLYMETHYL METHACRYLATES; ROBOTICS; SINGLE CRYSTALS; THERMAL CONDUCTIVITY;

CURRENT CONSUMPTION; ELECTROTHERMAL ACTUATORS; MICROMETER SCALES; NANOACTUATORS;

ACTUATORS;

EID: 14244265621     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/2/011     Document Type: Article

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