Metrology at the nanoscale: What are the grand challenges?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7042, Issue , 2008, Pages

  Lyons, Kevin W ^a   Postek, Michael T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Information management; Information technologies; Instrumentation; Integration; Interoperability; IT; Nanomanufacturing; Nanometrology; Standards

Indexed keywords

INDUSTRIAL RESEARCH; INFORMATION MANAGEMENT; INSTRUMENTS; MANAGEMENT INFORMATION SYSTEMS; NANOTECHNOLOGY; STANDARDS; TECHNICAL PRESENTATIONS; THREE DIMENSIONAL;

DIMENSIONAL METROLOGIES; GRAND CHALLENGES; INSTRUMENTATION; INTEGRATED MANUFACTURING; IT; MANUFACTURED PRODUCTS; MEASUREMENT METHODS; NANO METROLOGIES; NANOMANUFACTURING; NANOMETER SCALES; NANOMETROLOGY; NANOSCALE; NATIONAL NANOTECHNOLOGY INITIATIVES; PROCESS APPLICATIONS; PRODUCT PERFORMANCES; PRODUCT REALIZATIONS; RESEARCH DIRECTIONS; SCALE-UP; SYSTEMS APPROACHES;

MEASUREMENTS;

EID: 56249138278     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.798004     Document Type: Conference Paper

References (7)

1. National Nanotechnology Initiative (NNI) www.nano.gov
2. Manufacturing the Future, Report of the Interagency Working Group on Manufacturing Research and Development (R&D), Committee on Technology, National Science and Technology Council (NSTC), April 2008
3. Manufacturing at the Nanoscale, Report of the National Nanotechnology Initiative Workshops 2002-2004, http://www.nano.gov/html/res/pubs.html
4. NIST Manufacturing Engineering Laboratory, Nanomanufacturing Program (http://www.mel.nist.gov/proj/nm.htm)
5. Instrumentation and Metrology for Nanotechnology, Report of the National Nanotechnology Initiative Workshop, January 27-29, 2004, NIST - Gaithersburg, MD, http://www.nano.gov/NNI_Instrumentation_Metrology_rpt.pdf
6. Instrumentation, Metrology, and Standards for Nanomanufacturing Workshop, October 17-19, 2006, National Science and Technology Council (NSTC), Interagency Working Group (IWG) on Manufacturing Research and Development (R&D), NIST, NSF, and ONR sponsorship, Gaithersburg, MD [to be published 4Q2008]
7. Wikipedia Foundation, Inc., http://en.wikipedia.org/wiki/ Information_management