Fabrication of micromanipulator array for cell patterning

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1439-1442

  Shibata, Takayuki ^a   Yamanaka, Shinji ^a   Kato, Norihisa ^a   Kawashima, Takahiro ^a   Nomura, Mitsuyoshi ^a   Mineta, Takashi ^b   Makino, Eiji ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HIROSAKI UNIVERSITY   (Japan)

Author keywords

Cell patterning; Computational fluidic dynamics (CFD); Microelectromechanical system (MEMS); Micromanipulator array; Microneedles

Indexed keywords

CELL PATTERNING; CELLULAR NETWORK ANALYSIS; COMPUTATIONAL FLUIDIC DYNAMICS (CFD); DEEP-REACTIVE ION ETCHINGS; DRIE PROCESS; LIVING CELLS; MICROELECTROMECHANICAL SYSTEM (MEMS); MICRONEEDLE; MICRONEEDLES; NOTCHING EFFECTS; PARTICLE TRAPPING; POLYMER PARTICLES; SILICON DIOXIDES; TIP SHAPES; WET OXIDATIONS;

CELLULAR NEURAL NETWORKS; CELLULAR TELEPHONE SYSTEMS; DYNAMICS; ELECTRIC NETWORK ANALYSIS; FABRICATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; REACTIVE ION ETCHING; SILICA; SILICON OXIDES;

COMPOSITE MICROMECHANICS;

EID: 67349111843     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.046     Document Type: Article

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