Dynamic modeling and input shaping of thermal bimorph MEMS actuators

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 1, Issue , 2003, Pages 1470-1475

  Popa, Dan O ^a   Kang, Byoung Hun ^a   Wen, John T ^a   Stephanou, Harry E ^a   Skidmore, George ^b   Geisberger, Aaron ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b ZYVEX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; THERMAL EXPANSION;

DIFFERENTIAL THERMAL EXPANSION; INPUT SHAPING; JOULE HEATING; THERMAL BIMORPH ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0344585420     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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