Applications for surface-micromachined polysilicon thermal actuators and arrays

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 19-25

  Comtois, John H ^a   Bright, Victor M ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Actuator arrays; Micro optics; Micromachining; Micromotors; Self assembly; Thermal actuators

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING; OPTICS; STEPPING MOTORS;

ACTUATOR ARRAYS; ELECTRO THERMAL ACTUATORS; MICROMOTORS;

ACTUATORS;

EID: 0030705026     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80220-8     Document Type: Article

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