Design, fabrication, and characterization of thermally actuated probe arrays for Dip Pen nanolithography

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 594-602

  Bullen, David ^a   Wang, Xuefeng ^a   Zou, Jun ^a   Chung, Sung Wook ^b   Mirkin, Chad A ^b   Liu, Chang ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CHEMICALS; COMPUTER SIMULATION; DIFFUSION; GOLD; LITHOGRAPHY; PROBES; SILICON NITRIDE; SURFACE TESTING; TEMPERATURE CONTROL;

DIP PEN NANOLITHOGRAPHY; THERMAL ACTUATOR; THERMALY ACTUATED PROBE ARRAYS;

NANOTECHNOLOGY;

EID: 4344561529     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.828738     Document Type: Article

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