An out-of-plane electro-thermal polymer actuator

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 647-650

  Zhang, Dan ^a   Ding, Guifu ^a   Zhu, Lida ^a   Cheng, Jifeng ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

FEM; Out of plane actuator; Polymer actuator

Indexed keywords

CRYSTALLOGRAPHY; MANGANESE COMPOUNDS; NICKEL; NICKEL ALLOYS; OPTICAL DESIGN; PHOTORESISTS; POLYMERS;

AVERAGE TEMPERATURES; BI-LAYER STRUCTURES; DRIVING VOLTAGES; FEM; INPUT POWERS; INTERNATIONAL CONFERENCES; MOLECULAR SYSTEMS; OUT-OF PLANE; OUT-OF-PLANE ACTUATOR; PERPENDICULAR DIRECTIONS; POLYMER ACTUATOR; POLYMER ACTUATORS; SU-8 PHOTORESISTS; VERTICAL DISPLACEMENTS; VERTICAL FORCES;

ACTUATORS;

EID: 50249145834     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484414     Document Type: Conference Paper

References (8)

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