Mechanical characteristics of FIB deposited carbon nanowires using an electrostatic actuated Nano Tensile testing device

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 191-201

  Kiuchi, Mario ^a   Matsui, Shinji ^b,c   Isono, Yoshitada ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Carbon nanowire; Electrostatic comb drive actuator; Focused ion beam assisted chemical vapor deposition (FIB CVD); Fracture stress and deformation behavior; Tensile test; Young's modulus

Indexed keywords

CARBON NANOFIBERS; CHEMICAL VAPOR DEPOSITION; DEFORMATION; ELASTIC MODULI; ELECTROSTATIC ACTUATORS; FOCUSED ION BEAMS; FRACTURE; ION BEAM ASSISTED DEPOSITION; TENSILE STRENGTH; TENSILE TESTING;

CARBON NANOWIRES; ELECTROSTATIC COMB-DRIVE ACTUATOR; FOCUSED ION BEAM-ASSISTED CHEMICAL VAPOR DEPOSITION; FRACTURE STRAIN; FRACTURE STRESS;

NANOWIRES;

EID: 34147101804     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.889663     Document Type: Article

References (23)

1. S. Iijima, "Helical microtubeles of graphitic carbon," Nature, vol. 354, pp. 56-58, Nov. 1991.
2. P. Poncharal, Z. L. Wang, D. Ugarte, and W. A. de Heer, "Electrostatic deflections and electromechanical resonances of carbon nanotubes," Science, vol. 283, pp. 1513-1516, Mar. 1999.
3. J. Cumings and A. Zettl, "Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes," Science, vol. 289, pp. 602-604, Jul. 2000.
4. 60: Buckminsterfullerene," Nature, vol. 318, pp. 162-163, Nov. 1985.
5. J. Robertson, "Properties of diamond-like carbon," Surf. Coat. Technol., vol. 50, pp. 185-203, 1992.
6. S. J. Tans, A. R. M. Verschueren, and C. Dekker, "Room-temperature transistor based on a single carbon nanotube," Nature, vol. 393, pp. 49-52, May 1998.
7. J. Chen, C. Klinke, A. Afzali, and P. Avouris, "Self-aligned carbon nanotube transistors with charge transfer doping," Appl. Phys. Lett. vol. 86, 2005, 123108.
8. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, "Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B, vol. 18, no. 6, pp. 3181-3184, Nov./Dec. 2000.
9. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, T. Hoshino, K. Kondo, T. Kaito, T. Ichihashi, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima, and S. Matsui, "Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B vol. 21, no. 6, pp. 2737-2741, Nov./Dec. 2003.
10. T. Morita, K. Nakamatsu, K. Kanda, Y. Haruyama, K. Kondo, T. Hoshino, T. Kaito, J. Fujita, T. Ichihashi, M. Ishida, Y. Ochiai, T. Tajima, and S. Matsui, "Nanomechanical switch fabrication by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B, vol. 22, no. 6, pp. 3137-3142, Nov./Dec. 2004.
11. M. A. Haque and M. T. A. Saif, "Deformation mechanisms in free-standing nanoscale thin films: A quantitative in situ transmission electron microscope study," PNAS, vol. 101, no. 17, pp. 6335-6340, Apr. 2004.
12. Y. Zhu, N. Moldovan, and H. D. Espinosa, "A microelectromechanical load sensor for in-situ electron and x-ray microscopy tensile testing of nanostructures," Appl. Phys. Lett., vol. 86, 2005, 013506.
13. Y. Zhu and H. D. Espinosa, "An electromechanical material testing system for in-situ electron microscopy and applications," in Proc. Nat. Acad. Sci. USA, 2005, vol. 102, pp. 14503-14508.
14. B. G. Demczyk, Y. M. Wang, J. Cumings, M. Hetman, W. Han, A. Zettl, and R. O. Ritchie, "Direct mechanical measurement of the tensile strength and elastic modulus of multiwalled carbon nanotubes," Mater. Sci. Eng. A, vol. 334, pp. 173-178, 2002.
15. T. Namazu, Y. Isono, and T. Tanaka, "Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM," J. Microelectromech. Syst., vol. 9, no. 4, pp. 450-459, Dec. 2000.
16. T. Namazu, Y. Isono, and T. Tanaka, "Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures," J. Microelectromech. Syst., vol. 11, no. 2, pp. 125-135, Apr. 2002.
17. M. Born and E. Wolf, Principles of Optics. Oxford, U.K.: Pergamon, 1965, pp. 418-428.
18. C. Q. Davis and D. M. Freeman, "Statistics of subpixel registration algorithms based on spatiotemporal gradients or block matching," Opt. Eng., vol. 37, no. 4, pp. 1290-1298, Apr. 1998.
19. C. Q. Davis and D. M. Freeman, "Using a light microscope to measure motions with nanometer accuracy," Opt. Eng., vol. 37, no. 4, pp. 1299-1304, Apr. 1998.
20. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui, "Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillers grown by focused ion beam chemical vapor deposition," J. Vac. Sci. Technol. B, vol. 19, no. 6, pp. 2834-2837, Nov./Dec. 2001.
21. B. Marchon, J. Gui, K. Grannen, G. C. Rauch, J. W. Ager, III, S. R. P. Silva, and J. Robertson, "Photoluminescence and raman spectroscopy in hydrogenated carbon films," IEEE Trans. Magn., vol. 33, no. 5, pp. 3148-3150, Sep. 1997.
22. M. Taki, N. Yoshimoto, Y. Suzuki, T. Hashimoto, and Y. Tsukamoto, "Effect of hardness and topography on CSS performance of hydrogenated carbon films," Trans. Mater. Res. Soc. Japan, vol. 15B, pp. 929-932, 1994.
23. T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol., vol. 10, pp. 706-716, 1999.