A thermal actuator for nanoscale in situ microscopy testing: Design and characterization

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 242-253

  Zhu, Yong ^a   Corigliano, Alberto ^a,b   Espinosa, Horacio D ^a  

^a Northwestern University   (United States)

^b POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OPTIMIZATION; THERMOMECHANICAL TREATMENT; THIN FILMS;

IN SITU MICROSCOPY TESTING; MATERIAL TESTING SYSTEM; NANOWIRES (NW); THERMAL ACTUATORS;

ACTUATORS;

EID: 31344471247     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/008     Document Type: Article

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