Effect of thermophysical property variations on surface micromachined polysilicon beam flexure actuators

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 263-266

  Atre, Amarendra ^a   Boedo, Stephen ^a  

^a Rochester Institute of Technology   (United States)

Author keywords

ANSYS; Finite element analysis; Thermal conductivity; Thermal microactuators

Indexed keywords

ANSYS; BEAM FLEXURE ACTUATORS; JOULE HEATING; THERMAL MICROACTUATORS;

BOUNDARY CONDITIONS; BOUNDARY VALUE PROBLEMS; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); FABRICATION; FINITE ELEMENT METHOD; MICROACTUATORS; MICROMACHINING; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY; THERMODYNAMIC PROPERTIES; VACUUM APPLICATIONS;

POLYSILICON;

EID: 6344280314     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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