-
2
-
-
0000675407
-
Vertical thermal actuators for micro-opto-electromechanical systems
-
Cowan W.D., and Bright V.M. Vertical thermal actuators for micro-opto-electromechanical systems. SPIE 3226 (1997) 137-146
-
(1997)
SPIE
, vol.3226
, pp. 137-146
-
-
Cowan, W.D.1
Bright, V.M.2
-
3
-
-
33847276524
-
-
R.K. Messenger, Modeling and control of surface micromachined thermal actuators, MS Thesis, Brigham Young University, Provo, Utah, 2004.
-
-
-
-
4
-
-
31344437625
-
Design optimization of a surface micromachined electro-thermal beam flexure polysilicon actuator
-
Atre A. Design optimization of a surface micromachined electro-thermal beam flexure polysilicon actuator. Proceedings of the Modeling and Simulation of Microsystems (2005) 493-496
-
(2005)
Proceedings of the Modeling and Simulation of Microsystems
, pp. 493-496
-
-
Atre, A.1
-
5
-
-
0033096840
-
Analysis and design of polysilicon thermal flexure actuator
-
Huang Q.A., and Lee N.K.S. Analysis and design of polysilicon thermal flexure actuator. J. Micromech. Microeng. 9 (1999) 64-70
-
(1999)
J. Micromech. Microeng.
, vol.9
, pp. 64-70
-
-
Huang, Q.A.1
Lee, N.K.S.2
-
7
-
-
33847308547
-
-
R.Hickey, Analysis and optimal design of micro-machined thermal actuators, M.A.Sc Thesis, Dalhousie University, Nova Scotia, CA, 2001.
-
-
-
-
8
-
-
0041386059
-
Electrothermal properties and modeling of polysilicon microthermal actuators
-
Geisberger A.A., Sarkar N., Ellis M., and Skidmore G.D. Electrothermal properties and modeling of polysilicon microthermal actuators. J. Microelectromech. Syst. 12 4 (2004) 513-523
-
(2004)
J. Microelectromech. Syst.
, vol.12
, Issue.4
, pp. 513-523
-
-
Geisberger, A.A.1
Sarkar, N.2
Ellis, M.3
Skidmore, G.D.4
-
9
-
-
6344280314
-
Effect of thermophysical property variations on surface micromachined polysilicon beam flexure actuators
-
Atre A., and Boedo S. Effect of thermophysical property variations on surface micromachined polysilicon beam flexure actuators. Proceedings of the Modeling and Simulation of Microsystems 2 (2004) 263-267
-
(2004)
Proceedings of the Modeling and Simulation of Microsystems
, vol.2
, pp. 263-267
-
-
Atre, A.1
Boedo, S.2
-
10
-
-
33645983644
-
-
A. Atre, Modeling the response of surface micromachined thermal actuators, ASME International Mechanical Engineering Congress (2005) Paper No. IMECE 2005-79197, November 5-11, Orlando, FL.
-
-
-
-
11
-
-
33847287679
-
-
JDS Uniphase, Cronos Integrated Microsystems, North Carolina, http://www.memsrus.com.
-
-
-
-
12
-
-
0030182958
-
Electrothermal responses of lineshape microstructures
-
Lin L., and Chiao M. Electrothermal responses of lineshape microstructures. Sens. Actuators A 55 (1996) 35-41
-
(1996)
Sens. Actuators A
, vol.55
, pp. 35-41
-
-
Lin, L.1
Chiao, M.2
-
13
-
-
33847249848
-
-
ANSYS Online Help Manual, Version 6.1.
-
-
-
-
15
-
-
33847294630
-
-
R.P. Manginell, Polycrystalline-silicon microbridge combustible gas sensor, Ph.D Thesis, University of New Mexico, Albuquerque, NM, 1997.
-
-
-
-
16
-
-
0032303029
-
-
T. Butler, V.M. Bright, Electrothermal and Fabrication Modeling of Polysilicon Thermal Actuators, ASME DSC-MEMS, vol. 66, 1996. pp. 571-576.
-
-
-
-
18
-
-
0021463798
-
Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K
-
Okada Y., and Tokumaru Y. Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K. J. Appl. Phys. 56 2 (1984) 314-320
-
(1984)
J. Appl. Phys.
, vol.56
, Issue.2
, pp. 314-320
-
-
Okada, Y.1
Tokumaru, Y.2
-
19
-
-
33847266196
-
-
Mastrangelo, Thermal applications of microbridges, PhD Dissertation, University of California Berkeley, Berkeley, CA, 1991.
-
-
-
-
20
-
-
0035444093
-
Comprehensive thermal modeling and characterization of an electro-thermal-compliant microactuator
-
Mankame N.D., and Ananthasuresh G.K. Comprehensive thermal modeling and characterization of an electro-thermal-compliant microactuator. J. Micromech. Microeng. 11 (2001) 1-11
-
(2001)
J. Micromech. Microeng.
, vol.11
, pp. 1-11
-
-
Mankame, N.D.1
Ananthasuresh, G.K.2
|