A MEMS stage for 3-axis nanopositioning

Journal of Micromechanics and Microengineering

Volumn 17, Issue 9, 2007, Pages 1796-1802

  Liu, Xinyu ^a   Kim, Keekyoung ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; THICKNESS MEASUREMENT;

COMB DRIVES; IN-PLANE; NANOTECHNOLOGIES; OUT-OF PLANE; POSITIONING STAGE;

ELECTROSTATIC ACTUATORS;

EID: 51649097917     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/007     Document Type: Conference Paper

References (29)

1. Toshiyoshi H, Su G J, LaCosse J and Wu M C 2003 A surface micromachined optical scanner array using photoresist lenses frabricated by atheraml reflow process J. Lightwave Technol. 21 1700-8
2. Kwon S and Lee L P 2002 Stacked two-dimensional micro-lens scanner for microconfocal imaging array Proc. IEEE MEMS (Las Vagas, NV) pp 483-6
3. Kim C H, Jeong H M, Jeon J U and Kim Y K 2003 Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage J. Microelectromech. Syst. 12 470-8
4. Croft D and Devasia S 1999 Vibration compensation for high speed scanning tunneling microscopy Rev. Sci. Instrum. 70 4600-5
5. Lee C W and Kim S W 1997 An ultraprecision stage for alignment of wafers in advanced microlithography Precis. Eng. 21 113-22
6. Ku S S, Pinsopon U, Cetinkunt S and Nakajima S 2000 Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner IEEE/ASME Trans. Mechatronics 5 273-80
7. Ru C H and Sun L N 2005 Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model Rev. Sci. Instrum. 76 095111
8. Shen S C, Pan C T and Chou H P 2002 Electromagnetic optical switch for optical network communication J. Magn. Magn. Mater. 239 610-3
9. Xu Y, MacDonald N C and Miller S A 1995 Integrated micro-scanning tunneling microscope Appl. Phys. Lett. 67 2305-7
10. Tuantranont A, Bright V M, Zhang J, Zhang W, Neff J A and Lee Y C 2001 Optical beam steering using MEMS-controllable microlens array Sensors Actuators A 91 363-72
11. Bernstein J J, Taylor W P, Brazzle J D, Corcoran C J, Kirkos G, Odhner J E, Pareek A, Waelti M and Zai M 2004 Electromagnetically actuated mirror arrays for use in 3-D optical switching applications J. Microelectromech. Syst. 13 526-35
12. Krishnamoorthy U, Lee D and Solgaard O 2003 Self-aligned vertical electrostatic combdrives for micromirror actuation J. Microelectromech. Syst. 12 458-64
13. Miyajima H, Asaoka N, Isokawa T, Ogata M, Aoki Y, Imai M, Fujimori O, Katashiro M and Matsumoto K 2004 A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope J. Microelectromech. Syst. 12 243-51
14. Kim J and Lin L W 2005 Electrostatic scanning micromirrors using localized plastic deformation of silicon J. Micromech. Microeng. 15 1777-85
15. Zhou L X, Kahn J M and Pister K S J 2006 Scanning micromirrors fabricated by a SOI/SOI wafer-bonding process J. Microelectromech. Syst. 15 24-32
16. Joudrey K, Adams G G and McGruer N E 2006 Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirror J. Micromech. Microeng. 16 2147-56
17. Jaecklin V P, Linder C, De Rooij N F, Moret J M, Bischof R and Rudolf F 1992 Novel polysilicon comb actuators for xy-stages Proc. IEEE MEMS Workshop (Travemunde, Germany) pp 147-9
18. Kim C H and Kim Y K 2002 Micro XY-stage using silicon on a glass substrate J. Micromech. Microeng. 12 103-7
19. Kwon H N, Lee J H, Takahashi K and Toshiyoshi H 2006 Micro XY stages with spider-leg acutators for two-dimentional optical scanning Sensors Actuators A 130-131 468-77
20. Gu L, Li X X, Bao H F, Liu B, Wang Y L, Liu M, Yang Z X and Cheng B L 2006 Single-wafer-processed nano-positioning XY-stage with trench-sidewall micromachnining technology J. Micromech. Microeng. 16 1349-57
21. Lee C S B, Han S and MacDonald N C 2000 Single crystal silicon (SCS) XY-stage fabricated by DRIE and IR alignment Proc. IEEE MEMS (Miyazaki, Japan) pp 28-33
22. Bergna S, Gorman J J and Dagalakis N G 2005 Design and modeling of thermally actuated MEMS nanopositioner Proc. ASME IMECE (Orlando, FL) pp 1-8
23. Fan L, Wu M C, Choquette K D and Crawford M H 1997 Self-assembled microactuated XYZ stage for optical scanning and alignment Proc. Int. Conf. Solid-State Sensors and Actuators (Chicago, IL) pp 319-22
24. Ando Y 2004 Development of three-dimentional electrostatic stages for scanning probe microscope Sensors Actuators A 114 285-91
25. Takahashi K, Mita M, Fujita H and Toshiyoshi H 2007 Topological layer switch technique for monolithically integrated electrostatic XYZ-stage Proc. IEEE MEMS (Kobe, Japan) pp 651-4
26. Gere J M 2004 Mechanics of Materials 6th edn (Boston: Brooks/Cole Thomson Learning)
27. Pan B, Xie H M, Xu B Q and Dai F L 2006 Performance of sub-pixel registration algorithms in digital image correlation Meas. Sci. Technol. 17 1615-21
28. Sun Y, Piyabongkarn D, Sezen A, Nelson B J and Rajamani R 2002 A high-aspect-ratio two-axis electrostatic microactuator with extended travel range Sensors Actuators A 102 49-60
29. Piyabongkarn D, Sun Y, Rajamani R, Sezen A and Nelson B J 2005 Travel range extension of MEMS electrostatic microactuators IEEE Trans. Control Syst. Technol. 13 138-45