A differential laser Doppler system for one-dimensional in-plane motion measurement of MEMS

Measurement: Journal of the International Measurement Confederation

Volumn 40, Issue 6, 2007, Pages 623-627

  Zhong, Ying ^a   Zhang, Guoxiong ^a   Leng, Changlin ^a   Zhang, Tao ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Differential Doppler; In plane motion; Micro electro mechanical systems

Indexed keywords

DOPPLER EFFECT; LASER RESONATORS; MOTION ESTIMATION; VELOCITY MEASUREMENT; VIBRATION ANALYSIS;

DIFFERENTIAL LASER DOPPLER TECHNIQUES; IN-PLANE MOTION; MICROMACHINED RESONATORS; OPTICAL LAYOUT;

MICROELECTROMECHANICAL DEVICES;

EID: 34249679235     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2006.07.006     Document Type: Article

References (15)

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